MEMS inertial sensors in automotive are expected to grow at a faster pace than the broader MEMS market. The business to be ...

STMicroelectronics is acquiring NXP Semiconductors’ MEMS sensors business, an operation that produces electro-mechanical ...

Switzerland’s semiconductor company STMicroelectronics has agreed to acquire Dutch-based NXP Semiconductors ’ MEMS sensor ...

TDK Corporation has expanded its micro-electro-mechanical system (MEMS) inertial sensors portfolio with the Tronics AXO315 T0, a high-temperature MEMS accelerometer with ±14 g input range and a ...

The paper presents a monolithic vacuum packaging methodology specifically tailored for a CMOS MEMS resonator oscillator. The chip fabrication follows standardized CMOS MEMS process, ensuring ...

Previously described MEMS-based oscillators can achieve tight accuracy but operate at high frequency with power unsuitable for mobile applications. This paper introduces a 32kHz MEMS-based oscillator.