Primary MEMS sensors are pressure sensors, chemical sensors ... can be designed with sensors to measure the flow rate of a liquid sample and at the same time identify any contaminates within the ...

This isn't science fiction—it's the promise behind our newly developed nanomechanical sensor ... for blood pressure monitoring. His research emphasizes the versatility of MEMS technology in ...

pressure sensors, radio frequency (RF) resonating elements, and actuator structures, e.g., micromirrors, liquid and gas valves, pumps, etc. A related area of interest is the development of ...