Primary MEMS sensors are pressure sensors, chemical sensors ... can be designed with sensors to measure the flow rate of a liquid sample and at the same time identify any contaminates within the ...

The revolution in MEMS has resulted directly from semiconductor fab technologies, facilitating precision mass production at ...

This isn't science fiction—it's the promise behind our newly developed nanomechanical sensor ... for blood pressure monitoring. His research emphasizes the versatility of MEMS technology in ...

pressure sensors, radio frequency (RF) resonating elements, and actuator structures, e.g., micromirrors, liquid and gas valves, pumps, etc. A related area of interest is the development of ...

This growth is largely driven by inertial sensors ... Liquid-Phase and Thermo-compression) plays an essential role in the manufacture of these MEMS devices by enabling hermetic sealing and ...